[20a-PB4-1~10] 22.1 Joint Session M "Phonon Engineering"

[20a-PB4-6] Thermal design simulation for fabrication of top heat sink on planar-type thermoelectric generator with photoresist pillar

〇Ryoto Yanagisawa¹, Masahiro Nomura¹ (1.IIS Univ. of Tokyo)

Keywords:thermoelectric device, energy harvest, silicon

We designed a top heat sink structure which is fabricated on a silicon planar-type thermoelectric device with photoresist pillar. Finite element method simulation showed the top heat sink can improve temperature difference inside the device a lot, and it reaches 75 % of environmental temperature difference.