3:15 PM - 3:30 PM
△ [20p-B11-6] Production and optical emission spectroscopy ofradio frequency hollow cathode discharge plasmausing Ar/O2 mixed gas for high-speed ashing of polyimide film
Keywords:Ashing
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
Fri. Sep 20, 2019 1:15 PM - 5:15 PM B11 (B11)
Shusuke Nishiyama(Hokkaido Univ.), Mineo Hiramatsu(Meijo Univ.)
3:15 PM - 3:30 PM
Keywords:Ashing