The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[20p-B11-1~12] 8.1 Plasma production and diagnostics

Fri. Sep 20, 2019 1:15 PM - 5:15 PM B11 (B11)

Shusuke Nishiyama(Hokkaido Univ.), Mineo Hiramatsu(Meijo Univ.)

3:15 PM - 3:30 PM

[20p-B11-6] Production and optical emission spectroscopy ofradio frequency hollow cathode discharge plasmausing Ar/O2 mixed gas for high-speed ashing of polyimide film

Shinnosuke Honda1, Yasunori Ohtsu1, Yuta Ino1, Yuto Fukunaga1 (1.Saga Univ.)

Keywords:Ashing