3:30 PM - 3:45 PM
△ [20p-B11-7] Development of RF magnetron sputtering source for synthesis of water repellent thin film on the next-generation vehicle window
Keywords:sputtering, deposition, water-repellent
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
Fri. Sep 20, 2019 1:15 PM - 5:15 PM B11 (B11)
Shusuke Nishiyama(Hokkaido Univ.), Mineo Hiramatsu(Meijo Univ.)
3:30 PM - 3:45 PM
Keywords:sputtering, deposition, water-repellent