[20p-C212-1~7] Hydrogen in oxides and its role

[20p-C212-3] Research Trends in Oxide Semiconductor based Gas Sensors: Toward Highly Sensitive Hydrogen Gas Detection

〇Masatoshi Kitamura¹ (1.Kobe Univ.)

Keywords:hydrogen gas sensors, InGaZnO, gas sensors

In this presentation, I will introduce recent research on hydrogen gas sensors of semiconductor substrate type. After brief introduction of commercialized hydrogen gas sensors, I will talk about the hydrogen gas sensors using semiconducotr nanostrucutres. In addtion, I will introduce recent research on gas sensors having InGaZnO that are beginning to be used for flatpanel display. Based on the introduction, we will discuss issues and possibilities for highly sensitive hydrogen detection.