[20p-C213-1~14] 11.5 Junction and circuit fabrication process, digital applications

[20p-C213-12] Study on integrated processes for SFQ circuits and superconducting nano-devices

〇Naoki Kondo¹, Kyosuke sano¹, Tanaka Masamitu¹, Taro Yamashita^1,3, Masumi Inoue², Akira Fujimaki¹ (1.Nagoya Univ., 2.Meijo Univ., 3.JST-PRESTO)

Keywords:superconducting nano device