[20p-E204-1~11] 3.13 Semiconductor optical devices

[20p-E204-6] Lateral coupling integration of VCSEL and beam scanner with controlled cutoffwavelength
structure

〇Masashi Takanohashi¹, Keisuke Shimura¹, Xiaodong Gu¹, Masanori Nakahama¹, Akihiro Matsutani², Takahiro Sakaguchi¹, Fumio Koyama¹ (1.Tokyo Tech. FIRST, 2.Tokyo Tech. TechDept)

Keywords:VCSEL

High power and high beam quality lasers are required for laser processing and optical sensors such as LiDAR. In our laboratory, we achieved an output of 260 mW with a slow-light optical amplifier, but an external light source is used as a light source. Lateral integration using VCSEL as light source is possible but low light coupling efficiency is a problem. In this report, we propose and fabricate a high efficiency lateral coupling using optical confinement effect due to cutoff wavelength difference and report on beam sweep characteristics.