[20p-E204-1~11] 3.13 Semiconductor optical devices

[20p-E204-7] Integrated devices of MEM VCSEL and VCSEL beam deflector

〇Hiroki Ota¹, Xiaodong Gu¹, Takahiro Sakaguchi¹, Fumio Koyama¹ (1.Tokyo Tech. FIRST)

Keywords:beam deflector, VCSEL

In recent years, many manufacturers are working to commercialize and spread autonomous driving technology for ITS (Intelligent Transport System). In automated driving technology, the Light Detection and Ranging (LiDAR), which is a sensing system using light, has attracted attention in various traffic problems such as traffic congestion, traffic accidents, and driver's burden. Since LiDAR requires a high-performance beam deflector, this report discusses a structure that integrates MEMS VCSELs and VCSEL beam deflectors that can be expected to have high resolution.