The 80th JSAP Autumn Meeting 2019

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[20p-E310-1~21] 15.4 III-V-group nitride crystals

Fri. Sep 20, 2019 1:15 PM - 7:00 PM E310 (E310)

Narihito Okada(Yamaguchi Univ.), Yoshio Honda(Nagoya Univ.), Tomoyuki Tanikawa(Osaka Univ.)

1:45 PM - 2:00 PM

[20p-E310-3] Improvement of surface flatness using H2 etching in N-polar AlN

〇Ryota Sakamoto1, Tatuya Isono1, Tadatoshi Ito1, Kazuya Ataka2, Hiroshi Kawamura2, Narihito Okada1, Kazuyuki Tadatomo1 (1.Grad.School of Sci., 2.Department of Eng,Yamaguchi Univ.)

Keywords:AlN