[20p-E319-1~10] 【CS.6】 Code-sharing Session of 6.5 & 7.6

▲ [20p-E319-4] Morphological changes of Cu surfaces by comparison of Ar⁺ and Xe⁺ ion irradiation induced by photoemission-assisted plasma

〇SAIJIAN AJIA¹, Nobuhisa Kamata¹, Shuichi Ogawa¹, Yuji Takakuwa¹ (1.Tohoku Univ.)

Keywords:surface flattening, photoemission-assisted plasma ion source, momentum transfer effect

A photoemission-assisted plasma (PAP) ion source with Xe excimer lamp (hn =7.2 eV) has been developed to flatten Cu surfaces below 1 nm for achieving surface activated bonding at RT without pressurization. For this sake, ion beams with ion energy E_ion < 50 eV are demanded to avoid sputtering-induced roughening. In this study, the momentum transfer effect of ion irradiation on flattening of Cu surface has been clarified by comparison of Ar⁺ and Xe⁺ ion irradiation.