[20p-PA7-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-PA7-5] Research on the surface responsivity of a SnO₂ thin film for the highly sensitive gas sensing

〇Reo Kometani¹, Ryotaro Ueki¹, Penekwong Khemnat¹, Kenta Yoshihara², Shinji Kunori³, Katsuya Ikeda³, Kazuyuki Sashida³, Kenichi Yoshida³, Ichiro Yamada³, Yoshio Mita², Shin-ichi Warisawa¹ (1.Grad. Sch. of Front. Sci., Univ. of Tokyo, 2.Grad. Sch. of Eng., Univ. of Tokyo, 3.Shindengen Elec. Manu. Co., Ltd.)

Keywords:gas sensor, SnO2, surface responsivity

In this study, we researched on the surface responsivity of a SnO₂ thin film for the highly sensitive gas sensing. It was confirmed that the sensitivity was increased with the decrease in thickness of thin film. Then, we evaluated the surface responsivity of a SnO₂ thin film. As a result, there was a possibility that the sensitive region can be made to appear under N₂ atmosphere. Relation between surface responsivity and surface material properties will be reported in detail.