[20p-PB2-1~18] 7 Beam Technology and Nanofabrication (Poster)

[20p-PB2-6] Simulation of multiply scattered electron trajectories in scanning electron microscope specimen chamber

〇(M2)Yuka Ito¹, Kentaro Morimoto¹, Masatoshi Kotera¹ (1.Osaka Inst. of Technol.)

Keywords:scanning electron microscope, fogging electron