[21a-C309-1~13] 6.1 Ferroelectric thin films

[21a-C309-4] Doping effect on lead-free (K, Na)NbO₃ thin films

〇(M2)Takuya Fujita¹, Goon Tan¹, Isaku Kanno¹ (1.Kobe univ.)

Keywords:KNN, piezoelectric thin film, doping

Recently, lead-free (K, Na)NbO₃ thin films have attracted much attention as candidates to replace PZT thin films. Doping is one of the effective way to improve the electrical and piezoelectric properties. However, there have been few reports of systematic investigations. In this study, we prepared doped KNN thin films by radio frequency magnetron sputtering method using multi targets; KNN targets and dopant targets such as Na and Mn. We investigated the doping effect on the crystal structure and the electrical and piezoelectric properties of KNN thin films.