[21a-C310-1~12] 6.4 Thin films and New materials

[21a-C310-3] Gas sensor using anodic titania nanotube film decorated with platinum nanoparticles

〇Hiroyuki Abe¹, Teng Ma², Daisuke Tadaki³, Ayumi Hirano-Iwata^2,3, Yasuo Kimura⁴, Michio Niwano⁵ (1.ITIM, 2.AIMR, Tohoku Univ., 3.RIEC, Tohoku Univ., 4.Tokyo Univ. of Tech., 5.Tohoku Fukushi Univ.)

Keywords:anodic titania nanotube film, gas sensor, platinum fine particles

We fabricated a gas sensor decorating platinum fine particles of catalyst metal on TiO₂ nanotube thin film using atomic layer deposition method to improve the performance of the gas sensor (sensitivity improvement and response and shortening of recovery time). The detection characteristics (change in resistance of TiO₂ nanotube thin film due to gas adsorption) were measured by changing the concentration of carbon monoxide in mixed gas (including carbon monoxide, oxygen and nitrogen) in the range of 0.01 to 0.3 %. It was confirmed that carbon monoxide up to the concentration of 0.01 % could be detected in about 10 seconds.