[21a-PB1-1~86] 17 ナノカーボン（ポスター）

[21a-PB1-61] Characterization of top-gate MoS₂ MOSFETs with PEALD-ZrO₂ gate dielectric

〇WENHSIN CHANG¹、Naoya Okada¹、Hidehiro Asai¹、Koichi Fukuda¹、Mitsuhiro Okada¹、Takahiko Endo²、Yasumitsu Miyata²、Toshifumi Irisawa¹ (1.AIST、2.TMU)

キーワード：MoS2, Top-gate, MOSFET