Kei Watanabe

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 4:25 PM M103 (H103)

Symposium (Oral)
| Symposium
| Carbon related materials and plasma processing; state of the art and subjects

[10p-M103-1~7] Carbon related materials and plasma processing; state of the art and subjects

2:05 PM - 2:35 PM

[10p-M103-3] Challenge to carbon hard mask for high aspect ratio dielectric film patterning

〇Kei Watanabe¹ (1.Toshiba Memory)