MASAKI HASEGAWA

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 5:45 PM W933 (W933)

Symposium (Oral)
| Symposium
| Nanoscale 2D/3D analyses for new device and materials development II

[10p-W933-1~9] Nanoscale 2D/3D analyses for new device and materials development II

3:45 PM - 4:15 PM

[10p-W933-6] Detection of Defects on SiC Wafer by Using Mirror Electron Microscope

〇MASAKI HASEGAWA¹, KENJI KOBAYASHI¹, NORIYUKI KANEOKA¹, TOMOHIKO OGATA¹, KENTARO OHIRA¹, KAZUHIRO KAWAKAMI¹, TAKASHI GUNJI¹, KATSUNORI ONUKI¹ (1.Hitachi High-Tech)

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