Masataka Higashiwaki

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 5:50 PM W922 (Multi-Purpose Digital Hall)

Symposium (Oral)
| Symposium
| Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

[10p-W922-1~8] Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

4:50 PM - 5:20 PM

[10p-W922-7] Advancement in Ga₂O₃ Ion-Implantation Technologies and Their Applications to Device Processing

〇Masataka Higashiwaki¹, Man Hoi Wong¹, Chia-Hung Lin¹, Kohei Sasaki², Ken Goto^2,3,4, Akito Kuramata², Shigenobu Yamakoshi^2,4, Hisashi Murakami³, Yoshinao Kumagai³ (1.NICT, 2.Novel Crystal Technology, 3.Tokyo Univ. of Agri., 4.Tamura Corp.)