Shogo Shigemasu

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

[10a-M114-4] High activation of Poly-Si using short dwell Flash Lamp Annealing

〇Shogo Shigemasu¹, Hideaki Tanimura¹, Kazuhiko Fuse¹, Takayuki Aoyama¹, Shinichi Kato¹, Yoshihide Nozaki¹ (1.SCREEN Semiconductor Solutions)