Kazuya Kadota

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 5:00 PM S223 (S223)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[9p-S223-1~12] 7.3 Micro/Nano patterning and fabrication

2:00 PM - 2:15 PM

[9p-S223-2] Evolutional OPC as DTCO :
LWR and Sliming Effects on SNM of Fin-Trs SRAM by Computational Prediction

〇Kazuya Kadota¹ (1.NanoscienceLab)