Takashi Noguchi

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:15 AM - 10:30 AM

[10a-M114-6] Crystallization of a-Si Film on Panel using Lumped-shots ELA

〇Takashi Noguchi¹, Ryusuke Nakatsura¹, Yuya Ishiki¹, Tatsuya Okada¹, Karim Huet² (1.Univ. of the Ryukyus, 2.SCREEN Semiconductor Solutions Co., Ltd.)