Takuya Hizatsuki

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:15 PM W631 (W631)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[10a-W631-1~12] 3.7 Laser processing

11:00 AM - 11:15 AM

[10a-W631-8] Formation of curve pattern beyond diffraction limit on photoresist by laser drawing exposure method using coaxial interference pattern of optical vortices

〇(M1)Takuya Hizatsuki¹, Moritsugu Sakamoto¹, Kohei Noda¹, Tomoyuki Sasaki¹, Nobuyuki Kawatsuki², Kohei Goto³, Hiroshi Ono¹ (1.Nagaoka Univ. of Technol., 2.Univ. of Hyogo, 3.Nissan Chemical Corp.)

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