Kentaro Saito

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:15 PM - 5:45 PM W833 (W833)

Oral presentation
| 16 Amorphous and Microcrystalline Materials
| 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[10p-W833-1~17] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

3:00 PM - 3:15 PM

△ [10p-W833-8] Low-temperature yttrium oxide atomic layer deposition

〇Kentaro Saito¹, Kensaku Kanomata², Masanori Miura², BashirAhmmad Arima¹, Shigeru Kubota¹, Fumihiko Hirose¹ (1.Yamagata Univ., 2.ROEL Yamagata Univ.)