Ryosuke Okuyama

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 1:30 PM - 5:00 PM M111 (H111)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[12p-M111-1~13] 15.7 Crystal characterization, impurities and crystal defects

1:45 PM - 2:00 PM

[12p-M111-2] Characteristic of Molecule Ion Implanted Epitaxial Wafers for CMOS image sensor (Ⅰ)
-Reaction kinetic analysis of hydrogen diffusion behavior-

〇Ryosuke Okuyama¹, Ayumi Masada¹, Akihiro Suzuki¹, Koji Kobayashi¹, Satoshi Shigematsu¹, Ryo Hirose¹, Takeshi Kadono¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO)