Masaya Saito

→ Search for Masaya Saito in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:15 AM - 9:30 AM

[10a-M114-2] Sb-doped solid-phase crystallization for high-quality n-type polycrystalline Ge films

〇Masaya Saito¹, Daichi Takahara¹, Toshifumi Imajo¹, Kenta Moto¹, Takashi Suemasu¹, Kaoru Toko¹ (1.Univ. of Tsukuba)