Kota Yamazaki

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 10:00 AM - 11:30 AM W521 (W521)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[11a-W521-5~10] 17.3 Layered materials

11:15 AM - 11:30 AM

[11a-W521-10] Evaluation of film quality by various deposition condition of MOCVD MoS₂ film using i-Pr₂DADMo(CO)₃ as Mo precursor

〇(B)Kota Yamazaki¹, Yusuke Hibino^1,4, Seiya Ishihara^1,4, Yuya Oyanagi¹, Yusuke Hashimoto¹, Naomi Sawamoto¹, Hideaki Machida³, Manato Ishikawa³, Hiroshi Sudo³, Hitoshi Wakabayashi², Atushi Ogura¹ (1.Meiji Univ., 2.Tokyo Tech, 3.Gas-phase Growth Ltd., 4.JSPS Research Fellow)