Tatsunori Shibuya

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 4:45 PM W631 (W631)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[9p-W631-1~11] 3.7 Laser processing

2:15 PM - 2:30 PM

△ [9p-W631-3] Laser Processing of Dielectrics by Extreme Ultraviolet Femtosecond Pulses

〇(PC)Tatsunori Shibuya¹, Kazuyuki Sakaue², Thanh-Hung Dinh³, Takashi Takahashi^1,2, Masahiko Ishino³, Takeshi Higashiguchi⁴, Masakazu Washio⁵, Masahito Tanaka¹, Hiroshi Ogawa¹, Masaharu Nishikino³, Yohei Kobayashi², Ryunosuke Kuroda¹ (1.AIST, 2.UTokyo, 3.QST, 4.Utsunomiya Univ., 5.Waseda Univ.)

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