Renpeng Lu

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 1:15 PM - 4:00 PM W934 (W934)

Oral presentation
| 9 Applied Materials Science
| 9.3 Nanoelectronics

[12p-W934-1~10] 9.3 Nanoelectronics

3:30 PM - 3:45 PM

[12p-W934-9] Formation and characterization of resist collapse random pattern for nano-artifact-metrics

〇Renpeng Lu¹, Katsumi Shimizu¹, Xiang Yin¹, Yosuke Ueba², Mikio Ishikawa², Mitsuru Kitamura², Seiya Kasai¹ (1.Hokkaido Univ., 2.Dai Nippon Printing Co., Ltd.)

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