Takaaki Morimoto

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:00 PM - 7:00 PM M116 (H116)

Oral presentation
| 9 Applied Materials Science
| 9.1 Dielectrics, ferroelectrics

[10p-M116-1~22] 9.1 Dielectrics, ferroelectrics

1:00 PM - 1:15 PM

[10p-M116-1] Composition Dependence and Depth Profile of Density of Oxygen Vacancy in Solution-Processed IGZO

〇Takaaki Morimoto^1,3, Yicheng Yang^1,3, Nobuko Fukuda³, Yoshimichi Ohki^1,2 (1.SASE of Waseda Univ., 2.RIMST of Waseda Univ., 3.FLEC of AIST)