Yuri Mizukawa

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:15 AM - 11:30 AM

[10a-M114-9] Temperature Distribution Analysis in Molten Silicon during Atmospheric Pressure Thermal Plasma Jet Irradiation

〇Yuri Mizukawa¹, Hanafusa Hiroaki¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)