Yuya Sugie

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 10:00 AM - 11:30 AM M113 (H113)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[10a-M113-1~6] 6.2 Carbon-based thin films

11:00 AM - 11:15 AM

△ [10a-M113-5] Si-Containing Diamond-Like Carbon Films Prepared by Filtered Pulse Arc Deposition

〇Yuya Sugie¹, Takafumi Toya¹, Tsuyoshi Tanimoto¹, Toru Harigai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Shinsuke Kunitsugu³, Satoru Kaneko⁴, Makoto Taki⁵ (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind. Co., Ltd, 3.Ind. Technol. Cent. Okayama, 4.Kanagawa Inst. Ind. Sci. Technol., 5.Onward Ceram. Coat. Co., Ltd.)

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