Sai Hasegawa

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11a-PB2-1~10] 13.3 Insulator technology

9:30 AM - 11:30 AM

△ [11a-PB2-8] Evaluation of depth decomposition film quality of SiO₂ insulating film on Si substrate using angle resolved XPS

〇(M1)Sai Hasegawa¹, Sakura Takeda¹, Yuya Yoshie¹, mutsunori Uenuma¹, Yasuaki Ishikawa¹, Yukiharu Uraoka¹, Hiroshi Daimon¹ (1.NAIST)