Tomohiro Kuyama

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:45 PM - 5:30 PM W641 (W641)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:00 PM - 2:15 PM

△ [11p-W641-2] Detailed structure analysis of plasma-induced damage in silicon nitride films using conductance method

〇Tomohiro Kuyama¹, Keiichiro Urabe¹, Koji Eriguchi¹ (1.Kyoto Univ.)