Reito Wada

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 4:00 PM - 6:00 PM PA3 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[9p-PA3-1~18] 6.2 Carbon-based thin films

4:00 PM - 6:00 PM

[9p-PA3-11] Angle-resolved Photoelectron Spectroscopy Study of soft-ICP etching Damage Layer on Diamond Surface

〇Reito Wada¹, Kohei Takizawa¹, Yukako Kato², Ogura Masahiko², Makino Toshiharu², Yamasaki Satoshi², Nohira Hiroshi¹ (1.Tokyo city Univ., 2.AIST)