Ryosuke Hasegawa

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:15 PM - 4:30 PM W833 (W833)

Oral presentation
| 9 Applied Materials Science
| 9.2 Nanoparticles, Nanowires and Nanosheets

[11p-W833-1~12] 9.2 Nanoparticles, Nanowires and Nanosheets

3:45 PM - 4:00 PM

[11p-W833-10] High Density Formation of Hf-oxide Nanodots on Ultrathin SiO₂ by remote O₂ plasma enhanced MOCVD

〇Ryosuke Hasegawa¹, Katsunori Makihara¹, Akio Ohta¹, Mitsuhisa Ikeda¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)