Yuta Okanishi

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:30 AM - 11:30 AM S224 (S224)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[10a-S224-1~8] 7.5 Ion beams

10:00 AM - 10:15 AM

[10a-S224-3] Formation of gold nanoparticles in silicon oxide films by ion implantation using a Au-Si alloyed-metal ion source

〇Yuta Okanishi¹, Masayoshi Ichimiya¹, Junichi Yanagisawa¹ (1.Univ. of Shiga Pref.)