Jun Matsushita

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:30 PM S321 (S321)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[10a-S321-1~13] 1.3 Novel technologies and interdisciplinary engineering

9:45 AM - 10:00 AM

[10a-S321-4] Development of a pattern collapse-free drying process after wet cleaning by rapid drying technology

〇Jun Matsushita¹, Yuji Nagashima¹, Kounosuke Hayashi¹, Kiyokazu Nagahara¹, Kunihiro Miyazaki¹ (1.Shibaura Mechatronics)