Machiko Miyake

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 10:45 AM W241 (W241)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[10a-W241-1~7] 8.3 Plasma nanotechnology

9:00 AM - 9:15 AM

[10a-W241-1] Low Damage Radical Nitridation of Gold Nanoparticle Catalyst Coated Silicon

〇Machiko Miyake¹, Honda Kohei¹, Kitajima Takeshi¹, Nakano Toshiki¹ (1.N.D.A.)