Masanobu Honda

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 11:00 AM - 11:30 AM W241 (W241)

Oral presentation
| 8 Plasma Electronics
| 8.7 Plasma Electronics Invited Talk

[10a-W241-8~8] 8.7 Plasma Electronics Invited Talk

11:00 AM - 11:30 AM

[10a-W241-8] [INVITED] Latest trends of leading etch technology and future prospects

〇Masanobu Honda¹, Takayuki Katsunuma¹, Toru Hisamatsu¹, Yoshihide Kihara¹ (1.Tokyo Electron Miyagi)