ErinJoy Capdos Tinacba

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 9:00 AM - 12:00 PM W934 (W934)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10a-W934-1~11] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

10:00 AM - 10:15 AM

▼ [10a-W934-5] Molecular Dynamics Simulation of SiO₂Substrate Etching by NF₂⁺ and C₂F₅⁺ ions

〇(D)ErinJoy Capdos Tinacba¹, Michiro Isobe¹, Kazuhiro Karahashi¹, Satoshi Hamaguchi¹ (1.Osaka Univ.)