4:00 PM - 6:00 PM
[10p-PB5-28] Pressure dependence of CNM fabrication for LSI interconnect using supercritical ethanol
〇Hiroto Hagiwara1, Hikaru Sato1, Masatoshi Ito1, Yoshio Uhara1, Shigeru Saito1 (1.Tokyo University of Science)
Sun. Mar 10, 2019 4:00 PM - 6:00 PM PB5 (PB)
4:00 PM - 6:00 PM
〇Hiroto Hagiwara1, Hikaru Sato1, Masatoshi Ito1, Yoshio Uhara1, Shigeru Saito1 (1.Tokyo University of Science)