Hiromi Terachi

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 4:00 PM - 6:00 PM PB5 (PB)

Poster presentation
| 17 Nanocarbon Technology
| 17 Nanocarbon Technology (Poster)

[10p-PB5-1~55] 17 Nanocarbon Technology (Poster)

4:00 PM - 6:00 PM

[10p-PB5-31] Pressure and substrate temperature dependence of fabrication of CNM in nanohole
using supercritical carbon dioxide for LSI wiring

〇Hiromi Terachi¹, Tatsuya Yamazaki¹, Masatoshi Itoh¹, Yoshio Uhara¹, Shigeru Saito¹ (1.Tokyo Univ of Science)