Tetsu Kachi

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Speaker, Author, Co-Author

Sun. Mar 10, 2019 1:30 PM - 5:50 PM W922 (Multi-Purpose Digital Hall)

Symposium (Oral)
| Symposium
| Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

[10p-W922-1~8] Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

4:20 PM - 4:50 PM

[10p-W922-6] Ion Implantation Technology for GaN

〇Tetsu Kachi¹ (1.Nagoya Univ)