Reijiro Shimura

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 12:00 PM W351 (W351)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[11a-W351-1~11] 6.1 Ferroelectric thin films

9:00 AM - 9:15 AM

[11a-W351-1] Preparation of orientation controlled HfO₂-based ferroelectric thick film by puttering method and their electrical properties

〇(P)Reijiro Shimura¹, Takanori Mimura¹, Takao Shimizu¹, Hiroshi Funakubo¹ (1.Tokyo Tech. SMCT)