Tomotaka Hirano

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 11:45 AM W934 (W934)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:00 AM - 10:15 AM

[11a-W934-5] Development of multiple transfer process of Single-Crystalline Slicon Films on Flexible Substrate

〇(M1)Tomotaka Hirano¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Graduate School of Advanced Sciences of Matter Hiroshima Univ)