Koichi Hasebe

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:30 PM - 3:30 PM PA2 (PA)

Poster presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[11p-PA2-1~10] 1.3 Novel technologies and interdisciplinary engineering

1:30 PM - 3:30 PM

[11p-PA2-9] Measurement of optical transmittance for Ti film and bulk TiO₂ processed by N₂ plasma using cathode-heated reactive ion etching

〇Koichi Hasebe¹, Mina Sato¹, Akihiro Matsutani¹, Toshihiko Takeshima², Toshihiro Isobe², Akira Nakajima², Sachiko Matsushita² (1.Semiconductor and MEMS, Tokyo Tech, 2.School of Materials and Chemical Technology, Tokyo Tech)