Keita Furuoka

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:30 PM - 3:30 PM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[11p-PB3-1~27] 13.7 Compound and power electron devices and process technology

1:30 PM - 3:30 PM

[11p-PB3-11] Effects of forming gas annealing on electrical properties of Pt/ALD-Al₂O₃/AlGaN/GaN MIS-HEMTs

〇(M1)Keita Furuoka¹, Toshiharu Kubo¹, Takashi Egawa¹ (1.Nagoya Inst. of Tech.)