Hiroshi Nishida

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB1 (PB)

Poster presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[12a-PB1-1~9] 8.1 Plasma production and diagnostics

9:30 AM - 11:30 AM

[12a-PB1-5] Delayed discharge and optical emission characteristics in high power pulsed magnetron sputtering with Ar flow control

〇(M1)Hiroshi Nishida¹, Yoshihiro Hirai¹, Yuki Nakagomi¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

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