Yuuya Ohno

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB1 (PB)

Poster presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[12a-PB1-1~9] 8.1 Plasma production and diagnostics

9:30 AM - 11:30 AM

[12a-PB1-9] Measurement of Tetramethylsilane Plasma Properties for Si-containing DLC Coating -Gas-Flow Rate Dependence of Fundamental Plasma Properties-

〇Yuuya Ohno¹, Masayuki Nagai¹, Shun Suzuki¹, Akinori Oda¹, Takayuki Ohta², Hiroyuki Kousaka³ (1.Chiba Tech, 2.Meijo Univ., 3.Gifu Univ.)