Tomonori Nishimura

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 11:45 AM W934 (W934)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:30 AM - 10:45 AM

[11a-W934-7] Origin of weak Fermi-level pinning at silicide/Si interface

〇Tomonori Nishimura¹, Luo Xuan¹, Yajima Takeaki¹, Toriumi Akira¹ (1.The Univ. of Tokyo)

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

[12a-PB3-6] Two-band MIGS model at metal/semiconductor interface

〇Tomonori Nishimura¹, Yajima Takeaki¹, Toriumi Akira¹ (1.The Univ. of Tokyo)