Takanori Asano

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

[12a-PB3-7] 1 atomic-percent-resolution STEM-EELS analysis of boron impurity distribution in crystalline Si nano-region

〇Takanori Asano¹, Riichiro Takaishi¹, Hiroki Tanaka¹, Hidenori Miyagawa¹, Masumi Saitoh¹ (1.Toshiba Memory Corp.)